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SU3800/SU3900​

Scanning Electron Microscopes​

Performance & Power in a Flexible Platform

Hitachi High-Tech's scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance. The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.​

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  • Features
  • Resources

| Substantially Larger Specimen Chamber Accommodates Oversized and Heavy Samples

Robust Stage for Flexibility in Sample Size, Shape, and Weight

◙ The specimen exchange sequence prevents potential damage to the system or the sample.

The procedure for exchanging specimens can be performed by referring to the graphic user interface to avoid the risk of damage due to human error, even with irregular or large samples.

◙ Specimen Exchange Chamber *

Exchange the specimen without venting the specimen chamber, improving throughput.

◙ Increase sample manipulation with the Stage Movement Restriction Cancellation function *

The SU3800/SU3900 can be configured with the Stage Movement Restriction Cancellation function*, which increases the flexibility of stage movement. The operator can move the stage based on their imaging requirements free of restrictions.
Note: When the Stage Movement Restriction Cancellation function is used, caution and the Chamber Scope must be used in order to ensure safe operation.

◙ The Chamber Scope enhances the safety of stage movements *

The Chamber Scope is a device for monitoring the inside of the specimen chamber. By using an infrared camera the inside of the specimen chamber can be monitored during SEM image observation. It is also possible to magnify the Chamber Scope image and view the sample position more clearly.

Increased Viewing Area—SEM MAP Expands the Boundaries of Sample Navigation

◙ Integrated in-chamber camera display

SEM MAP, now in-chamber, offers wide-angle camera navigation* within the graphic user interface. By specifying the observation target position on SEM MAP, the operator can move the stage seamlessly to any position within the observable area and switch from a wide field of view color image to a high-magnification SEM image by freely zooming in and out. Any image can be imported and utilize this capability.

◙ Easily navigate the entire observable area

Wide-area SEM MAP images are obtained by stitching numerous images. Navigate to any location of the observable areas, 127 mm dia./200 mm dia. (SU3800/SU3900) with a single click. If necessary, the stage will rotate automatically during navigation.

◙ Detector-oriented rotation

The graphic user interface makes it easy to visually grasp the orientation between the sample and the detectors allowing the operator to seamlessly navigate regions of interest, incorporating rotation. During the observation/analysis of samples with topographic irregularities, rotating the stage and scanning direction while looking at SEM MAP alleviates challenges, such as the influence of shadows.

| Evolution of the Market—Improved Automatic Functions for Operators of Any Skill Level

◙ Multiple Modes of Operation

◙ Automatic Functions for Operators of Any Skill Level

◙ Improved Auto Focus function

◙ Multi Zigzag* Enables Wide-Area Observation across Multiple Areas

| Integrated Solutions for Various Applications

◙ A Variety of Accessories Mountable on Any of the 20 Ports on the Innovative SU3900 Specimen Chamber.

◙ SEM/EDS Integration System*

◙ High Sensitivity Detectors Supporting All Observation Requirements

◙ STEM holder (Option)

◙ 3D Modeling Software: Hitachi map 3D*

◙ Image Processing, Measurement, and Analysis Software: Image-Pro® for Hitachi

*optional

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