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The AFM5500M is an AFM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It affords exceptional levels of ease of use, automation, and accuracy, as well as correlation for AFM/SEM investigations.
◙ Fully addressable 4-inch stage eliminating the need for sample remount/rotation
◙ Wide-open tip and sample access
◙ Point-and-click function enabling easy and quick camera-based sample navigation
◙ All built-in accessories allowing seamless and software-controlled mode switching
|Automation
◙ Automated cantilever exchange
◙ Automated laser alignment
◙ Automated image optimization (RealTune® II)
◙ Automated AFM measurements following a recipe
|Accuracy
◙ Flexure-based design providing superior flat and orthogonal scan
◙ Closed-loop scanner allowing highly linear and accurate imaging
◙ Low sensor noise yielding high-resolution and high-quality results
◙ Tip evaluation capability ensuring probe quality and artifact-free images
Flat Scan
Conventional AFM with a piezoelectric tube scanner requires data flattening or leveling because of its intrinsic curved motion. However, this flattening may distort a sample' s micro-surface structure, including its Z value. The newly developed AFM5500M is equipped with a flexure-based scanner that enables well-controlled raster scans along X and Y directions only. As a result, this advanced scanner design can effectively eliminate background curvatures in a wide scan area and improve the accuracy of AFM measurements.
High Orthogonality
Using a conventional piezoelectric tube scanner can cause cross-talk when bending the tube scanner.
This cross-talk leads to distortions and asymmetrization. The improved AFM5500M’s scanner reduces cross-talk making both accurate and symmetric measurements possible.
|Correlation
Correlative AFM and SEM Imaging
The Hitachi-proprietary SEM/AFM shared alignment holder provides quick and easy measurements and analysis of topography, structures, composition, and surface property.
